Cleanroom

ACHIEVE GREATER THROUGHPUT WITH HIGH SPEED

The demand for cleanroom automation solutions is increasing at a rapid rate with the growth of both the medical and consumer electronics industries. The microchips that control consumer devices are all cut from a delicate silicon wafer that is handled by specially designed robots in a cleanroom environment. Robots used in certain medical and pharmaceutical applications require conformance to cleanroom standards while achieving great speed and repeatability. Technology offers solutions to solve today's challenges in cleanroom applications.

  • Speeds up to 5000 mm/s for medical and pharmaceutical
  • Semiconductor robots reach up to 5 FOUPs
  • Semiconductor robots handle up to 700 WPH
  • Repeatability of ± 0.1 mm
  • Collision detection
  • Full automatic teaching option
  • Through-arm cable and tube
  • Ceiling mount arms available

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